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Evrard, Q., Sadegh, N., Hsu, C. C., Mahne, N., Giglia, A., Nannarone, S., Ekinci, Y., Vockenhuber, M., Nishimura, A., Goya, T., Sugioka, T., & Brouwer, A. M. (2023). Influence of the anion in tin-based EUV photoresists properties. In D. Guerrero, & G. R. Amblard (Eds.), Advances in Patterning Materials and Processes XL Article 124980Z (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 12498). SPIE. https://doi.org/10.1117/12.2658498
Sadegh, N., Evrard, Q. J. O., Mahne, N., Giglia, A., Nannarone, S., & Brouwer, A. M. (2023). Electron Generation in Tin-oxo Cage Extreme Ultraviolet Photoresists. Journal of Photopolymer Science and Technology, 36, 373-378.
2021
Zhang, Y., Haitjema, J., Castellanos, S., Lugier, O., Sadegh, N., Ovsyannikov, R., Giangrisostomi, E., Johansson, F. O. L., Berggren, E., Lindblad, A., & Brouwer, A. M. (2021). Extreme ultraviolet photoemission of a tin-based photoresist. Applied Physics Letters, 118(17), Article 171903. https://doi.org/10.1063/5.0047269[details]
van der Geest, M. L. S., Sadegh, N., Meerwijk, T. M., Wooning, E. I., Wu, L., Bloem, R., Castellanos Ortega, S., Brouwer, A. M., & Kraus, P. M. (2021). Extreme ultraviolet-excited time-resolved luminescence spectroscopy using an ultrafast table-top high-harmonic generation source. Review of Scientific Instruments, 92(11), Article 113004. https://doi.org/10.1063/5.0064780[details]
Lugier, O., Troglia, A., Sadegh, N., van Kessel, L., Bliem, R., Mahne, N., Nannarone, S., & Castellanos, S. (2020). Extreme ultraviolet photoelectron spectroscopy on fluorinated monolayers: Towards nanolithography on monolayers. Journal of Photopolymer Science and Technology, 33(2), 229-234. https://doi.org/10.2494/photopolymer.33.229[details]
Sadegh, N., van der Geest, M., Haitjema, J., Campi, F., Castellanos, S., Kraus, P. M., & Brouwer, A. M. (2020). XUV induced bleaching of a tin oxo cage photoresist studied by high harmonic absorption spectroscopy. Journal of Photopolymer Science and Technology, 33(2), 145-151. https://doi.org/10.2494/photopolymer.33.145[details]
Sadegh, N., Campi, F., van Leeuwen, S., Kraus, P., Castellanos Ortega, S., & Brouwer, A. M. (2019). EUV Generation for ultrafast spectroscopy of extreme ultraviolet photoresists. Poster session presented at CHAINS 2019.
2018
Sadegh, N. (2018). EUV Generation and ultrafast pump-probe spectroscopy. Poster session presented at ELENA conference 2018, Warsaw, Poland.
Talk / presentation
Evrard, Q. (speaker), Sadegh, N. (speaker), Watts, B. (speaker), Mahne, N. (speaker), Giglia, A. (speaker), Nannarone, S. (speaker), Ekinci, Y. (speaker), Vockenhuber, M. (speaker) & Brouwer, F. (speaker) (2022). Can fluorine improve the performance of tin-based EUV photoresists?, International Conference on Photopolymer Science and Technology , Japan (on-line), June 2 - 30, 2022, Chiba.
Sadegh, N. (speaker), van der Geest, M. (speaker), Evrard, Q. (speaker), Nannarone, S. (speaker), Giglia, A. (speaker), Mahne, N. (speaker), Kraus, P. M. (speaker) & Brouwer, F. (speaker) (2021). Soft-X-ray absorption and photoemission spectroscopy of tin-oxo cage Extreme Ultraviolet photoresists, LEELIS2021.
Evrard, Q. (speaker), Sadegh, N. (speaker), Watts, B. (speaker), Mahne, N. (speaker), Giglia, A. (speaker), Nannarone, S. (speaker), Ekinci, Y. (speaker), Vockenhuber, M. (speaker) & Brouwer, F. (speaker) (2021). Can fluorine improve the performance of tin-based EUV photoresists?, LEELIS2021.
Sadegh, N. (speaker), Campi, F. (speaker), Haitjema, J. (speaker), van der Geest, M. (speaker), Kraus, P. (speaker), Brouwer, F. (speaker) & Castellanos Ortega, S. (speaker) (2019). Soft x-ray absorption spectroscopy of inorganic photoresists, ELENA conference, Leuven.
2023
Sadegh, N. (2023). Spectroscopic investigations of photon-induced reactions in tin-oxo cage photoresists. [Thesis, fully internal, Universiteit van Amsterdam]. [details]
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