Evrard, Q., Sadegh, N., Hsu, C. C., Mahne, N., Giglia, A., Nannarone, S., Ekinci, Y., Vockenhuber, M., Nishimura, A., Goya, T., Sugioka, T., & Brouwer, A. M. (2023). Influence of the anion in tin-based EUV photoresists properties. In D. Guerrero, & G. R. Amblard (Eds.), Advances in Patterning Materials and Processes XL Article 124980Z (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 12498). SPIE. https://doi.org/10.1117/12.2658498
Sadegh, N., Evrard, Q. J. O., Mahne, N., Giglia, A., Nannarone, S., & Brouwer, A. M. (2023). Electron Generation in Tin-oxo Cage Extreme Ultraviolet Photoresists. Journal of Photopolymer Science and Technology, 36, 373-378.
2021
Zhang, Y., Haitjema, J., Castellanos, S., Lugier, O., Sadegh, N., Ovsyannikov, R., Giangrisostomi, E., Johansson, F. O. L., Berggren, E., Lindblad, A., & Brouwer, A. M. (2021). Extreme ultraviolet photoemission of a tin-based photoresist. Applied Physics Letters, 118(17), Article 171903. https://doi.org/10.1063/5.0047269[details]
van der Geest, M. L. S., Sadegh, N., Meerwijk, T. M., Wooning, E. I., Wu, L., Bloem, R., Castellanos Ortega, S., Brouwer, A. M., & Kraus, P. M. (2021). Extreme ultraviolet-excited time-resolved luminescence spectroscopy using an ultrafast table-top high-harmonic generation source. Review of Scientific Instruments, 92(11), Article 113004. https://doi.org/10.1063/5.0064780[details]
Lugier, O., Troglia, A., Sadegh, N., van Kessel, L., Bliem, R., Mahne, N., Nannarone, S., & Castellanos, S. (2020). Extreme ultraviolet photoelectron spectroscopy on fluorinated monolayers: Towards nanolithography on monolayers. Journal of Photopolymer Science and Technology, 33(2), 229-234. https://doi.org/10.2494/photopolymer.33.229[details]
Sadegh, N., van der Geest, M., Haitjema, J., Campi, F., Castellanos, S., Kraus, P. M., & Brouwer, A. M. (2020). XUV induced bleaching of a tin oxo cage photoresist studied by high harmonic absorption spectroscopy. Journal of Photopolymer Science and Technology, 33(2), 145-151. https://doi.org/10.2494/photopolymer.33.145[details]
Sadegh, N., Campi, F., van Leeuwen, S., Kraus, P., Castellanos Ortega, S., & Brouwer, A. M. (2019). EUV Generation for ultrafast spectroscopy of extreme ultraviolet photoresists. Poster session presented at CHAINS 2019.
2018
Sadegh, N. (2018). EUV Generation and ultrafast pump-probe spectroscopy. Poster session presented at ELENA conference 2018, Warsaw, Poland.
Spreker
Evrard, Q. (speaker), Sadegh, N. (speaker), Watts, B. (speaker), Mahne, N. (speaker), Giglia, A. (speaker), Nannarone, S. (speaker), Ekinci, Y. (speaker), Vockenhuber, M. (speaker) & Brouwer, F. (speaker) (2022). Can fluorine improve the performance of tin-based EUV photoresists?, International Conference on Photopolymer Science and Technology , Japan (on-line), June 2 - 30, 2022, Chiba.
Sadegh, N. (speaker), van der Geest, M. (speaker), Evrard, Q. (speaker), Nannarone, S. (speaker), Giglia, A. (speaker), Mahne, N. (speaker), Kraus, P. M. (speaker) & Brouwer, F. (speaker) (2021). Soft-X-ray absorption and photoemission spectroscopy of tin-oxo cage Extreme Ultraviolet photoresists, LEELIS2021.
Evrard, Q. (speaker), Sadegh, N. (speaker), Watts, B. (speaker), Mahne, N. (speaker), Giglia, A. (speaker), Nannarone, S. (speaker), Ekinci, Y. (speaker), Vockenhuber, M. (speaker) & Brouwer, F. (speaker) (2021). Can fluorine improve the performance of tin-based EUV photoresists?, LEELIS2021.
Sadegh, N. (speaker), Campi, F. (speaker), Haitjema, J. (speaker), van der Geest, M. (speaker), Kraus, P. (speaker), Brouwer, F. (speaker) & Castellanos Ortega, S. (speaker) (2019). Soft x-ray absorption spectroscopy of inorganic photoresists, ELENA conference, Leuven.
2023
Sadegh, N. (2023). Spectroscopic investigations of photon-induced reactions in tin-oxo cage photoresists. [Thesis, fully internal, Universiteit van Amsterdam]. [details]
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